AVS 59th Annual International Symposium and Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeM

Paper EW-WeM8
Mass Spectrometer Now Supports Process Control

Wednesday, October 31, 2012, 10:20 am, Room West Hall

Session: Exhibitor Technology Spotlight
Presenter: S. Lass, Brooks Automation
Correspondent: Click to Email

With the introduction of the 835 Vacuum Quality Monitor and 835 Differential Pumping System, Granville-Phillips has added key control features and extended the operating pressure range to enable process monitoring and control. Driving outputs from user-defined equations which utilize the partial pressures from this gas analysis system provides the ability to start and stop a process based on specific conditions. And differential pumping allows operation at both process and base-out pressures. Process pressure operation together with the features required for process control will be covered.