AVS 59th Annual International Symposium and Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeL

Paper EW-WeL3
Physics-based Simulation for Semiconductor Processing Optimization

Wednesday, October 31, 2012, 12:40 pm, Room West Hall

Session: Exhibitor Technology Spotlight
Presenter: N. Solanki, ESI Group
Authors: K. Jain, ESI Group
N. Solanki, ESI Group
Correspondent: Click to Email
ESI Group is a global supplier of end-to-end virtual prototyping software and solutions, incorporating the physics of materials for manufacturing industries. The presentation will focus on computation fluid dynamics (CFD) modeling in the semiconductor fabrication process. Semiconductor fabrication processes involve a complex interplay of physical and chemical phenomena at multiple time and length scales. The complexity of these processes is increasing with decreasing feature size. Understanding these processes is critical for achieving desirable feature characteristics. ACE Suite, from ESI Group, is a commercial CFD software that provides integrated simulation tools for analyzing a wide variety of semiconductor reactors, ranging from CVD to Electroplating reactors. The ACE Suite also includes a topological solver, CFD-TOPO, that allows designers to accurately predict the 3D shape evolution of the feature at micron level. Our presentation will include the key features and benefits of our software along with a few selected validation studies.