AVS 59th Annual International Symposium and Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeL

Paper EW-WeL1
Nanoparticle Coating Technology for Vacuum Deposition

Wednesday, October 31, 2012, 12:00 pm, Room West Hall

Session: Exhibitor Technology Spotlight
Presenter: M. Green, Mantis Deposition Ltd., UK
Authors: A.H. Kean, Mantis Deposition Ltd., UK
S. Saranu, Mantis Deposition Ltd., UK
M. Green, Mantis Deposition Ltd., UK
L. Allers, Mantis Deposition Ltd., UK
Correspondent: Click to Email
In-vacuum generation and deposition of nanoparticles can provide enhancement to traditional thin film deposition techniques. Traditional thin film deposition in vacuum utilizes an evaporation, or sputter process that forms a two dimensional thin film. The Mantis Deposition Nanogen provides three dimensional nanoparticle crystals that are formed via a high pressure sputtering process. Through the process, the nanoparticles are thermalized, charged, and deposited on the substrate via a controlled beam. The resulting coating is a not a traditional thin film, but a three dimensional material consisting of deposited nanoparticles. Significant differences in the properties of these materials arise including greatly increased surface area and increased chemical reactivity. Because the nanoparticles are charged they can be measured and their kinetic energy may be controlled. This talk describes the technique as well as resulting material properties. Specific examples will be described as well as new nanoparticle structures such as core/shell materials enabled by this advanced technique.