AVS 59th Annual International Symposium and Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeA

Paper EW-WeA5
Heidelberg Instruments microPG501, A Direct Write Lithography Tool

Wednesday, October 31, 2012, 3:20 pm, Room West Hall

Session: Exhibitor Technology Spotlight
Presenter: N. Wijnaendts van Resandt, Heidelberg Instruments
Correspondent: Click to Email
Heidelberg Instruments Presents the newest addition to its lineup of Direct Write Lithography tools. These tools are used for the production of photomasks as well as for direct write on substrates for MEMS, microfluidics, MicroTAS, micro optics and a wide variety of other applications where a lithographic process is required.