Although most commercial rechargeable batteries are prepared by bulk and powder processing methods, vapor deposition of materials has led to important advances for fundamental research, for modification of battery materials and interfaces, and also for commercialization of thin film batteries. Each of these areas will be illustrated with our studies of thin film materials for the electrolyte, anode, and cathode components of rechargeable lithium and lithium-ion batteries with both planar and 3-dimensional architectures.