AVS 58th Annual International Symposium and Exhibition
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuP

Paper VT-TuP3
Pumping Performance of Scroll Pump

Tuesday, November 1, 2011, 6:00 pm, Room East Exhibit Hall

Session: Vacuum Technology Poster Session & Student Poster Competition
Presenter: Fan-Chun Hsieh, National Applied Research Laboratories, Taiwan, Republic of China
Authors: F.C. Hsieh, National Applied Research Laboratories, Taiwan, Republic of China
P.H. Lin, National Applied Research Laboratories, Taiwan, Republic of China
J.C. Lu, National Applied Research Laboratories, Taiwan, Republic of China
F.Z. Chen, National Applied Research Laboratories, Taiwan, Republic of China
Correspondent: Click to Email
Scroll pumps are widely used in solar-optic and semiconductor industry for backing purpose. The performance of scroll pump could affect significantly the performance of pumping station. The performance of a scroll pump was predicted by using VacTran commercial software and the experiment were conducted to verify the prediction in this study. Specifically, the delivered pumping speed, conductance and delivered throughput of the pump were investigated. The experimental delivered pumping speed increased as the inlet pressure increased and reached to 291.05 L/min at 11.62 mbar. As the inlet pressure increased, the conductance increased to 4.58x103 L/min at 1.18x102 mbar. The analysis delivered throughput increased obvious from 3.77x10-2 mbar and reached its maximum value at 1.2x102 mbar. The standard deviation between analysis and experimental delivered pumping speed was less than 15% in the pressure ranges from 1.9x10-1 mbar to 45.3 mbar.