Current vacuum trends driven by end users requirements are demanding vacuum pumps with better performance in smaller packages. This is driving pump manufacturers to redesign their pumps and/or to consider new ways to combine pumping technologies more efficiently. In response to this trend it has been found it may be advantageous in UHV-XHV systems to use Non Evaporable Getter (NEG) pump as the main pumping element and complement it with a small ion pump to remove inert gases and methane. A novel design of such a combination, called NEXTorr®[1], was first introduced in 2010 at this conference.

Since the introduction, extensive studies have been carried out indicating the success of this configuration. Also, a broader range of pump models has been introduced, featuring pumping speed from 100 to 500 l/s (H2).

The result of the vacuum characterization carried out on the pumping performances for a variety of gases of interest for UHV-XHV applications is discussed in this paper. Pumping speed measurements, pump down, rate of rise and out-gassing tests have been conducted and in some cases compared with traditional pumping approaches based on large sputter ion pumps. The advantages coming from the synergic integration of the NEG and the ion pump elements are highlighted and discussed. Examples of applications showing how this novel family of pumps can simplify the design and operation of vacuum systems are also presented and critically reviewed.

[1] NEXTorr is an International Trademark registered by the “Madrid System” property of SAES Getters S.p.A.