AVS 58th Annual International Symposium and Exhibition
    Nanometer-scale Science and Technology Division Tuesday Sessions
       Session NS-TuP

Paper NS-TuP6
Nanoscale Surface Patterning for Controllable Metal Deposition

Tuesday, November 1, 2011, 6:00 pm, Room East Exhibit Hall

Session: Nanometer-scale Science and Technology Division Poster Session
Presenter: Gregory Smith, University of Kansas
Authors: G. Smith, University of Kansas
C.L. Berrie, University of Kansas
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Nanoscale patterning techniques using an atomic force microscope on self-assembled monolayers (SAMs) are used to controllably form metal nanofeatures on gold and silicon surfaces. Nanoetching and nanografting are done on methyl-terminated SAMs to pattern in molecules with carboxyl termination. Oxidative lithography is used to electrochemically oxidize nanopatterns into methyl-terminated SAMs to achieve similar results. These nanopatterns are then treated with an electroless metal plating solution to form metal nanostructures selectively on the patterns. The patterns and features are characterized with atomic force microscopy. Controllable metal nanostructure formation has implications in nanoelectronics and nanodevice construction.