AVS 58th Annual International Symposium and Exhibition
    Nanometer-scale Science and Technology Division Tuesday Sessions
       Session NS-TuP

Paper NS-TuP4
Facile Metal Oxide Nanosheet Synthesis using Atomic Layer Deposition

Tuesday, November 1, 2011, 6:00 pm, Room East Exhibit Hall

Session: Nanometer-scale Science and Technology Division Poster Session
Presenter: Kyoungmi Lee, North Carolina State University
Authors: K. Lee, North Carolina State University
G.N. Parsons, North Carolina State University
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Two dimensional nanosheets have attracted great interest due to their unique thermal and electrical properties. For example, graphene nanosheets which are exfoliated from graphite or synthesized using a chemical solution have shown the potential applications as an electrode, catalysts, and electrochemical sensors. In addition to graphene, various kinds of materials such as MoS2, MnO2, and MgO nanosheets have been studied extensively. This work demonstrates that atomic layer deposition (ALD) is a facile but effective technique for fabrication of metal oxide nanosheets precisely controlling thickness and chemical composition. We spin-coated a substrate with polymer such as PMMA, PVA, and PAA as a sacrificial layer, then coated the polymer with TiO2 or ZnO ALD. We made small cuts through the metal oxide/polymer film, and then dissolved the polymer in solvent to release nanosheets from the substrate. We successfully attained two dimensional TiO2 nanosheets with several hundred μm in lateral size and less than 10 nm in thickness. In addition to single material nanosheets, we can effectively form heterogeneous nanosheets with two metal oxides such as TiO2/ZnO, where each layer thickness is individually controlled. We confirmed the thickness with AFM and compositions with EDX. We are exploring possible applications for these materials, and available results will be presented and discussed.