| AVS 58th Annual International Symposium and Exhibition | |
| Electronic Materials and Processing Division | Thursday Sessions |
| Session EM-ThP |
| Session: | Electronic Materials and Processing Poster Session |
| Presenter: | Mardecial Hines, Alabama A&M University |
| Authors: | M. Hines, Alabama A&M University J. Lenhardt, Alabama A&M University M. Lu, Brookhaven National Laboratory Z. Xiao, Alabama A&M University |
| Correspondent: | Click to Email |
In this paper, we report to fabricate multilayered Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSexthin film cooling devices using the microfabrication techniques. The multilayered Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSexthin films will be grown using the e-beam evaporation. The in-plane and cross-plane micro cooling devices will be fabricated using the standard integrated circuit (IC) fabrication process; pn junction diodes will be fabricated as thermometers for the measurement of temperature in the devices. The electrical and thermal properties of the e-beam-grown Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSexthin films and the cooling efficiency of the fabricated cooling devices will be measured, and the measurement results will be reported in the conference. The developed devices could be a good candidate for the application of high-efficiency solid-state micro-cooling.