| AVS 57th International Symposium & Exhibition | |
| Thin Film | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | TF-TuA1 Studying Roll-to-Roll ALD Process Conditions Using a Moving Substrate Under a Gas Source Coating Head R. Fitzpatrick, Z.M. Gibbs, S.M. George, University of Colorado |
| 2:20pm | TF-TuA2 Reactive Intermediates during Atomic Layer Deposition of Aluminum Oxide from Ozone and an Oxygen Plasma V.R. Rai, Colorado School of Mines, V. Vandalon, Eindhoven University of Technology, Netherlands, S. Agarwal, Colorado School of Mines |
| 2:40pm | TF-TuA3 Synthesis of Micro/Mesoporous Alumina Fibers by Gas Phase Infiltration of Polyesters with Trimethyl Aluminum and Water B. Gong, Q. Peng, C. Devine, K. Lee, G.N. Parsons, North Carolina State University |
| 3:00pm | TF-TuA4 Growth Rate Control in ALD by Surface Functionalization: Alkyl Alcohols on Metal Oxides A. Yanguas-Gil, J.W. Elam, Argonne National Laboratory |
| 4:00pm | TF-TuA7 Waterless TiO2 Atomic Layer Deposition using Titanium Tetrachloride and Titanium Tetraisopropoxide V.R. Anderson, A.S. Cavanagh, A.I. Abdulagatov, Z.M. Gibbs, S.M. George, University of Colorado |
| 4:20pm | TF-TuA8 Growth Mechanism and Properties of MgxZn(1-x)O Nanocomposites by Atomic Layer Deposition Q. Peng, A.U. Mane, J.W. Elam, Argonne National Laboratory |
| 4:40pm | TF-TuA9 Nucleation and Growth of Conformal and Ultrathin Pt Films on Al2O3 and W Substrates Using Plasma Enhanced ALD L. Baker, A.S. Cavanaugh, D. Seghete, S.M. George, University of Colorado, A.J.M. Mackus, E.W.M.M. Kessels, Eindhoven University of Technology, Netherlands, Z.Y. Liu, F.T. Wagner, General Motors Research & Development |
| 5:00pm | TF-TuA10 Homogeneous Thermal Decomposition of Triethylaluminum: Effect of NH3 J. Lee, T.J. Anderson, University of Florida |
| 5:20pm | TF-TuA11 Surface Reactions of TiCl4 and Al(CH3)3 on GaAs(100) B. Granados, A.J. Muscat, University of Arizona |
| 5:40pm | TF-TuA12 Atomic Layer Deposition of Co-Al Films Studied by In-Situ Infrared Spectroscopy J. Kwon, Y.J. Chabal, University of Texas at Dallas, J. Anthis, R. Kanjolia, SAFC Hitech |