AVS 57th International Symposium & Exhibition
    Thin Film Tuesday Sessions
       Session TF-TuP

Paper TF-TuP13
High Temperature Oxidation Performance of Multilayered AlxTi1-xN/CrN Coatings

Tuesday, October 19, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Thin Film Poster Session I
Presenter: Y.Y. Chang, Mingdao University, Taiwan, Republic of China
Authors: Y.Y. Chang, Mingdao University, Taiwan, Republic of China
W.H. Wu, Mingdao University, Taiwan, Republic of China
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The high temperature oxidation behavior of AlxTi1-xN and multilayered AlxTi1-xN/CrN coatings was studied. These coatings were synthesized by cathodic-arc evaporation with plasma enhanced duct equipment. Chromium and AlTi alloy alloy (70/30 at. % ratio) cathodes were used for the deposition of AlxTi1-xN/CrN coatings. During the coating process of multilayered AlxTi1-xN/CrN, CrN was deposited as an interlayer. The multilayered structure was obtained by regulation of cathode power at a constant rotation speed of sample holders. The nanolayer thickness and alloy content of the deposited multilayered coating were correlated with the emission rate of alloy cathode materials. In this study, field emission scanning electron microscope (FESEM), and X-ray diffraction using glancing angle parallel beam geometries were used to characterize the microstructure of the deposited films. High resolution transmission electron microscope (HRTEM) was used for nanolayered structure analyses of the multilayered AlxTi1-xN/CrN coatings. For the high temperature oxidation test, the coated samples were annealed in the temperature range 700~1000 oC in air for 2 hours. After oxidation, the deposited AlxTi1-xN had completely transformed to TiO2 and Al2O3 at 900 oC. Interestingly, the multilayered AlxTi1-xN/CrN possessed superior oxidation resistance than the graded AlxTi1-xN. The different oxidation mechanisms of AlxTi1-xN and multilayered AlxTi1-xN/CrN at high temperature are developed in this study.