AVS 57th International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF-ThA

Paper TF-ThA10
In situ Stoichiometry Control using Reflection-High-Energy-Electron-Diffraction Generated X-rays

Thursday, October 21, 2010, 5:00 pm, Room Ruidoso

Session: Multifunctional Thin Films and Characterization
Presenter: C. Keenan, West Virginia University
Authors: C. Keenan, West Virginia University
S. Chandril, West Virginia University
T.H. Myers, Texas State University - San Marcos
D. Lederman, West Virginia University
Correspondent: Click to Email

One major challenge in the stoichiometric growth of complex oxides, such as YMnO3, is the control of the relative compositions of the constituent materials. Desirable properties of oxide materials, such as ferroelectricity, are highly dependent upon material stoichiometry, making stoichiometry control an important issue. While RHEED (Reflection High Energy Electron Diffraction) analysis is typically used as a qualitative tool, RHEED generated x-rays can be used to give quantitative compositional information. The relative compositions of Y and Mn in MBE grown YMnO3 samples were studied using the grazing exit x-rays generated by RHEED electrons. Comparing the results with RBS characterization suggested that the technique has the potential for real-time compositional analysis.

This work was funded by the Office of Naval Research ( Grant N00014-02-1-0974), the Air Force Office of Scientific Research (MURI grant F49620-03-1-0330), and the National Science Foundation (CIAM-DMR grant 0502825).