AVS 57th International Symposium & Exhibition | |
Thin Film | Wednesday Sessions |
Session TF+SE-WeM |
Session: | Glancing Angle Deposition (GLAD) I |
Presenter: | E.B. Schubert, University of Nebraska - Lincoln |
Authors: | E.B. Schubert, University of Nebraska - Lincoln D. Schmidt, University of Nebraska - Lincoln T. Hofmann, University of Nebraska - Lincoln A.C. Kjerstad, University of Nebraska - Lincoln E. Montgomery, University of Nebraska - Lincoln S. Schöche, University of Nebraska - Lincoln M. Schubert, University of Nebraska - Lincoln |
Correspondent: | Click to Email |
Bottom-up and self-organized three-dimensional (3D) structure design on the nanoscale opens a new field in nanostructure based thin film engineering with a broad range of practical applications for sensors, optical coatings, photovoltaic devices or biomaterials, for example. Sculptured thin films (STF’s) belong to this group of thin films and current research creates exciting new knowledge about the unique material properties that are related to shape, dimension, and distribution of the nanostructures within the thin film ensemble. The following paper presents new sculptured thin film properties obtained from material analysis using optical, magnetic, magneto-optical and electrochemical characterization techniques. [1-5] Material properties have been quantified from model analysis and results from our investigations lead to original device designs for applications such as highly-sensitive mass balances, subwavelength antireflection coatings, magneto-optical memory and chemical sensors.
[1] E. Schubert, Contributions to Plasma Physics 47, 545 (2007).
[2] D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangen, and M. Schubert, Appl. Phys. Lett. 94, 011914 (2009).
[3] D. Schmidt, B. Booso, T. Hofmann, E. Schubert, A. Sarangan, and M. Schubert, Opt. Lett. 34, 992 (2009).
[4] D. Schmidt, A. C. Kjerstad, T. Hofmann, R. Skomski, E. Schubert, and M. Schubert, J. Appl. Phys. 105, 113508 (2009).
[5] D. Schmidt, T. Hofmann, E. Schubert, and M. Schubert, Appl. Phys. Lett. 96, 091906 (2010).