Microplasmas, a rapidly growing technology, are normally operated at or near atmospheric pressure with dimensions ranging from microns to millimetres. [1] We are developing this technology for surface modification without using a physical mask or additional processing steps to increase the versatility and cost-effectiveness of the technology. Micropatterning of various chemistries and biomolecules is seen as vital to the successful development of new and emerging technologies, such as microfluidics and high throughput cell screening tools. [1, 2] In this presentation, the fabrication process of microcavity plasma array devices will be introduced, followed by a demonstration of the utility of these devices for generating specially well-controlled micron-scale surface treatment and polymer deposition. Two issues regarding the utility of these devices for localised surface modification were investigated: 1) Can these devices be used to modify a surface with micron-scale features without having the substrate pressed against the array? 2) Can this be achieved with control over diffusion of the plasma reactive components? We explored this through XPS imaging and small spot analysis, which gave insights into the surface chemistry of the micron-scale modified areas. Finally, we demonstrate the utility of microcavity plasma array surface engineering in the development of biological cell arrays.

 

1. Iza, F., et al., Microplasmas: Sources, particle kinetics, and biomedical applications. Plasma Processes and Polymers,

 2008. 5(4): p. 322-344.

2. Klages, C.-P., et al., Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices. Contributions to Plasma

 Physics, 2007. 47(1-2): p. 49-56.