AVS 57th International Symposium & Exhibition
    Nanometer-scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP9
Fabrication of Ordered Nanodot Arrays Utilizing Anodic Aluminum Oxide Template Formed on Si Substrate

Tuesday, October 19, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Nanometer-Scale Science and Technology Poster Session
Presenter: N.Y. Kwon, Sungkyunkwan University, Republic of Korea
Authors: N.Y. Kwon, Sungkyunkwan University, Republic of Korea
N.K. Kim, Sungkyunkwan University, Republic of Korea
J.K. Yeon, Sungkyunkwan University, Republic of Korea
G.Y. Yeom, Sungkyunkwan University, Republic of Korea
I.S. Chung, Sungkyunkwan University, Republic of Korea
Correspondent: Click to Email
We have fabricated anodic aluminum oxide (AAO) with two types of structures, namely, hexagonal and matrix arrays of pores. At first, Al thin films with the thickness of 2 um grown on Si (100) substrates were anodized in 0.3 M oxalic acid under conditions of 4 °C at 40 V. Then the hexagonal AAO templates with the thickness of 300 nm were obtained using two-step anodization. Alternatively, AAO template with a matrix pores was prepared utilizing focused ion beam milled indent. The size of pores was controlled between 30 nm and 60 nm by immersing in 5 % phosphoric acid at 20 °C. In order to obtain smaller size of pores, the barrier layer was removed by neutral ion beam etching. Finally, we successfully fabricated hexagonal and matrix AAO templates with the pore sizes between 10 nm and 60 nm. The Si surfaces at the AAO pore bottoms were cleaned with dilute hydrofluoric acid after annealing at 900 °C in Ar gas. We then fabricated ordered Au and Ni nanodots arrays with controllable size between 10 nm and 60 nm. Scanning probe microscopy (SPM) and field emission secondary electron microscopy (FE-SEM) were used for characterization on shape of AAO and nanodots arrays.