| AVS 57th International Symposium & Exhibition | |
| Nanometer-scale Science and Technology | Tuesday Sessions |
| Session NS-TuM |
| Session: | Nanomanufacturing and Nanomachines |
| Presenter: | J.-H. Cho, Los Alamos National Laboratory |
| Authors: | J.-H. Cho, Los Alamos National Laboratory T. James, Johns Hopkins University D. Gracias, Johns Hopkins University |
| Correspondent: | Click to Email |
It is well known that surface patterning on three dimensional (3D) nanostructures can alter their physical and chemical properties. However, present day nanoparticles such as nanowires and nanopolyhedra have limited to no surface patterning. Lithographic processes enable precise patterning and are very well developed. There are several nanolithographic techniques such as electron beam (e-beam), imprint, and dip pen lithography that can enable patterning, but in an inherently two dimensional manner.
In this talk, we describe strategies to curve and rotate precisely patterned thin film templates to form 3D nanostructures such as cubes, pyramids, tubes, scrolls and talons. The highlight of the approach is that the process leverages already existing nanolithographic techniques and enables structures to be formed with any desired surface patterns in all three dimensions; a line width resolution of 10 nm was achieved.
We utilized multiple layers of electron beam lithography to pattern 2D templates. Patterns with homogeneous (pores in nickel panels) or dissimilar materials (e.g. gold lines on nickel or alumina) were defined. Curvature of hingeless templates and rotation of hinged panels was achieved by triggering grain coalescence in tin (Sn). Polyhedral particles ranging in size from 100-900 nm and surface patterning of 15 nm could be achieved. In addition, curved nanostructures with both homogeneous (rings, tubes) and variable (spirals, talons) radii of curvature could be formed.
Our demonstration of patterning of self-assembly of precisely patterned polyhedral and curved nanoparticles has material versatility and we believe that this strategy can be utilized to integrate optical, electronic and biological elements on the surfaces of nanoparticles with unprecedented precision and in all three dimensions for a range of applications.