| AVS 57th International Symposium & Exhibition | |
| MEMS and NEMS | Thursday Sessions |
| Session MN-ThP |
| Session: | MEMS and NEMS Poster Session |
| Presenter: | C.S. Yu, ITRC, Taiwan, Republic of China |
| Authors: | C.S. Yu, ITRC, Taiwan, Republic of China Y.C. Hu, ITRC, Taiwan, Republic of China H.-S. Huang, ITRC, Taiwan, Republic of China J.-S. Kao, ITRC, Taiwan, Republic of China |
| Correspondent: | Click to Email |