| AVS 57th International Symposium & Exhibition | |
| MEMS and NEMS | Thursday Sessions |
| Session MN-ThP |
| Session: | MEMS and NEMS Poster Session |
| Presenter: | A. Kasahara, National Institute for Materials Science, Japan |
| Authors: | A. Kasahara, National Institute for Materials Science, Japan H. Suzuki, National Institute for Materials Science, Japan M. Goto, National Institute for Materials Science, Japan H. Araki, National Institute for Materials Science, Japan M. Tosa, National Institute for Materials Science, Japan |
| Correspondent: | Click to Email |
There is considerable research at present on the performance and properties of nanosheets, nanofibers and other functional nanomaterials such as fullerenes and nanotubes. This is particularly true of carbon nanotube, made from carbon atoms, where many research projects throughout the world are looking at measurement techniques for evaluating electrical and electronic characteristics with a view to developing electronic device applications such as high-intensity field-emitted electron sources and ultra-fast transistors. We have prepared long crystal silicon wires with a diameter of several tens of nano meters at a temperature lower than 523k by using the low-pressure low-temperature CVD method. To use these as materials for application to micro-nano electromechanical system, we need to fully understand their electric, chemical and mechanical properties. However, we have not yet to see a genuine, flexible methodology for evaluating the key characteristic of mechanical strength essential to micro-nano structural materials development the nanoscale equivalent of mechanical strength testers for ordinary materials. This is due to the inherent difficulties associated with the manipulation and transportation of materials at the micro-nano scale level.The most difficult part of the handling of small materials is to fix material samples.