AVS 57th International Symposium & Exhibition
    Energy Frontiers Topical Conference Thursday Sessions
       Session EN-ThP

Paper EN-ThP7
Synthesis and Characterization of Free-Standing Si Nanocrystals using PECVD

Thursday, October 21, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Energy Frontiers Topical Conference Poster Session
Presenter: R. Chaukulkar, Colorado School of Mines
Authors: R. Chaukulkar, Colorado School of Mines
B.N. Jariwala, Colorado School of Mines
S. Weeks, Colorado School of Mines
N.J. Kramer, Eindhoven University of Technology, Netherlands
S. Agarwal, Colorado School of Mines
Correspondent: Click to Email

Si nanocrystals (NCs) (size <5nm) are generating an increased interest as a material to be used in third generation photovoltaics (PVs) owing to their size-dependent band gap, visible photoluminescence and multiple exciton generation (MEG). Synthesis of both liquid and gas phase NCs have been reported in the literature. We synthesize the Si NCs using a capacitively-coupled SiH4/Ar plasma generated using radio-frequency power. The Si NCs are characterized using in situ attenuated total reflection Fourier-transform infrared spectroscopy (ATR-FTIR) and ex situ techniques such as transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy, infrared spectroscopy, photoluminescence spectroscopy, Raman spectroscopy and X-ray diffraction. The size of the NCs can be controlled by varying the residence time in the plasma volume. The residence time is adjusted to attain a particle size of 5nm collected on a grid. The crystallinity of the NCs depends on the amount of rf power put in the plasma. By varying the input rf power we were successful in demonstrating the transition from amorphous to crystalline nanoparticles using X-ray diffraction and TEM.