Transparent conducting oxide (TCO) thin films and coatings are an important and integral part of a number of electro optical devices because TCOs play an important role as transparent electrodes for flexible optoelectronic devices such as liquid crystal displays, solar cell panels, and organic light emitting devices (OLEDs). Typical TCOs are impurity-doped indium oxides, tin oxides and zinc oxides that offer commercially acceptable performance in terms of conductivity transmittance, environmental stability, reproducibility and surface morphology. The Al-doped ZnO (AZO) films show low resistance and high transmittance in the visible range of the spectrum. However, there resistivity is rather high in some case to adapt as a transparent electrode for advanced applications. Recently, in order to improve properties of TCO, thin metal or metal alloy film was embedded between TCO layers. In this study, we will discuss the effect of Au middle layer thickness on the electrical and optical properties of the multilayer TCOs and OLED applications. The AZO films were deposited on Corning eagle 2000 glass substrates by atomic layer deposition (ALD). The Optimization conditions of AZO films were 1/19 ratio of TMA/DEZ and 180°C. And Au middle layer were deposited by e-beam evaporator. The AZO/Au/AZO films exhibit better electrical properties compared to the AZO films. The carrier concentration was increased from 1.9 × 1020 to 5.8 × 1020 Cm-3. The mobility was decreased from 12.6 to 12.4 Cm2/Vs. The resistivity was decreased from 2.6 × 10-3 to 8.5 × 10-4 Ω Cm. However transmittance was decreased from 91 to 76 %, on average. The AZO/Au/AZO films were used as anode electrodes for red emission OLED application. The device showed that a maximum luminance of 2.4 × 103 cd/m2 at 11 voltage. More detailed electrical and physical results will be discussed and presented.