AVS 57th International Symposium & Exhibition
    Electronic Materials and Processing Tuesday Sessions
       Session EM-TuP

Paper EM-TuP2
The Relationship between Surface Termination and Crystal Structure for HPCVD-grown InN Layers

Tuesday, October 19, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Electronic Materials and Processing Poster Session
Presenter: A.R. Acharya, Georgia State University
Authors: A.R. Acharya, Georgia State University
M. Buegler, Georgia State University
S. Gamage, Georgia State University
J.S. Tweedie, North Carolina State University
R. Collazo, North Carolina State University
N. Dietz, Georgia State University
B.D. Thoms, Georgia State University
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The surface structure and termination of semiconductor thin films are important factors during epitaxial growth and may affect the interfacial properties of devices. The structure and surface bonding configuration of indium nitride layers grown by high pressure chemical vapor deposition (HPCVD) have been studied using high resolution electron energy loss spectroscopy (HREELS) and X-ray diffraction (XRD). HREELS analysis of InN layers suggests that the surface is primarily terminated with NH2 species. This result is consistent with XRD, which shows the co-existence of different surface orientations. The observed termination by NH2 is in contrast to previous HREELS work on HPCVD-grown InN layers, which showed only NH species on the nitrogen-terminated surface.