AVS 57th International Symposium & Exhibition
    Electronic Materials and Processing Tuesday Sessions
       Session EM-TuP

Paper EM-TuP15
Nanoparticle-enhanced Multilayered Thin Film Cooling Devices

Tuesday, October 19, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Electronic Materials and Processing Poster Session
Presenter: M. Hines, Alabama A&M University
Authors: M. Hines, Alabama A&M University
C. Cochran, Alabama A&M University
Z. Xiao, Alabama A&M University
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We report the fabrication of solid-state cooling devices using the nanoparticle and Bi2Te3 and Sb2Te3 multilayered thermoelectric thin films. The multilayer thin films have a periodic structure consisting of alternating Bi2Te3 and nanoparticle layeres or Sb2Te3 and nanoparticle layers. The Bi2Te3 and Sb2Te3 thin films were deposited using e-beam evaporation. PbS Nanoparticle thin film was prepared to form the multilayered film using spin coating. The multilayer structure of films and the interface of layers were analyzed by X-ray diffraction and reflection. The multilayer thin films-based cooling devices were fabricated using the microfabrication process. The thermal and electrical properties of the nanoparticle-enhanced multilayered thin films and the cooling temperature difference of the fabricated devices were measured. The measurement results on the nanoparticle-enhanced material systems and the fabricated cooling devices will be reported in the conference.