| AVS 56th International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Posters and Student-Built Vacuum Systems Poster Competition |
| Presenter: | J.Y. Lim, KRISS, Korea |
| Authors: | J.Y. Lim, KRISS, Korea H.Y. CHoi, LOTVacuum, Korea W.S. Cheung, KRISS, Korea J.H. Shin, KRISS, Korea S.B. Kang, KRISS, Korea Y.-H. Shin, KRISS, Korea |
| Correspondent: | Click to Email |
Recent SEMATECH and SEMI studies showed that 50~60% of equipment power is used for vacuum pumps. Currently vacuum pump suppliers have responded by reducing power consumption and cooling water flow requirement in energy consumption at the component level. Actual process studies showed that for some processes, the energy consumption level did not change significantly during idle and processing operation modes. However, specified studies in experimental scale to characterize the energy consumption pattern have not been reported yet.
We have performed a simulation study to characterize energy consumption pattern in the idle and process modes.
The pressure range of about 0.1 to 50 mbar for 7 minutes was assigned to the simulated process mode, meanwhile the pressure of <0.1 mbar for 3 minutes to the idle mode. The integrated characteristics evaluation system for dry vacuum pumps has been utilized to gather the dry pump characteristics data for the simulation. The evaluation system exploits the constant volume flowmeter to measure the mass flow rate real-timely in standard level, and facilitates the evaluation of spatially averaged sound power levels using a reverberation chamber. Roots, claw, classical screw, and multi-stage type vacuum pumps supplied from the manufacturers have been evaluated using the evaluation system in terms of ultimate pressure, pumping speed, power consumption, vibration, sound power as well as nitrogen purge, cooling water rate from the single pump monitoring system in time-synchronized mode. This study includes the application of the SEMI S23-0705 standards – A Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment.
The estimated power consumption per pump per year was ranged from 10 to 30 MWh and 15 to 50 MWh for 600 ~ 1200 m3/h dry pumps in idle and processing modes, respectively. The utility energy consumption was also ranged from 5 to 10 MWh and 10 to 30 MWh, respectively. More specific energy consumption patterns with respect to the pressure are also presented. In this work we suggest that the correlation mechanism dependant on the actual process lines should be carefully analyzed and furthermore understood, for example, the relationship between cooling water flow rate and temperature variation during processes.