| AVS 56th International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Posters and Student-Built Vacuum Systems Poster Competition |
| Presenter: | J. Vanderford, Northern Illinois University |
| Authors: | J. Vanderford, Northern Illinois University A.P. Genis, Northern Illinois University |
| Correspondent: | Click to Email |
The purpose of this project was to document the efforts of restoring a thirty-five year old Veeco 776 vacuum deposition system equipped with a 3 inch ion beam milli-tron which was destroyed in a laboratory fire. This was a system used for the deposition of Indium Tin Oxide (ITO) used for the fabrication of ITO / P-Silicon solar cells. The fire destroyed all electronics for powering the ion source, the gas delivery system for the ion source, vacuum measurement and valve control systems, the substrate chuck heat controller, and considerable damage to the vacuum pump stack and valves Due to the age of the system, direct replacement of these components were not available. The goal of this project was not only to rebuild the vacuum system but also to incorporate a data acquisition and logging system for monitoring and recording critical process parameters associated with the operation of the system in a real time graphic interface environment. The design and engineering which was required to complete this project, as well as the re-engineering of specialized components to achieve these goals will be presented.