Silver oxide films were deposited on glass substrates by magnetron sputtering of a silver target in various Ar–O2 reactive mixtures with deposited temperature. After deposition, some of these films were annealed using a rapid thermal annealing (RTA) system, with the variation of temperature. A UV-VIS-NIR photometer and a Hall measurement system were used to characterize the optical and electrical properties of these films. The films show a systematic changed from Ag2O(hexagonal) phase to Ag+Ag2O(cubic) phases at various annealing temperatures. When the annealing temperature is higher than 300oC, the Ag2O(hexagonal) phase transformed to Ag+Ag2O(cubic) composite phases. Accordingly, the band gap of these films will change, along with the optical and electrical properties.

 

Keywords: silver oxide, UV-VIS, rapid thermal annealing, optical property, electrical property.