AVS 56th International Symposium & Exhibition
    Advanced Surface Engineering Tuesday Sessions
       Session SE-TuP

Paper SE-TuP3
Microstructure and Corrosion Resistance of Nano-Crystalline ZrTiN Films on AISI 304 Stainless Steel Substrate

Tuesday, November 10, 2009, 6:00 pm, Room Hall 3

Session: Advanced Surface Engineering Poster Session
Presenter: Y.W. Lin, Instrument Technology Research Center, Taiwan
Authors: Y.W. Lin, Instrument Technology Research Center, Taiwan
J.H. Huang, National Tsing Hua University, Taiwan
G.P. Yu, National Tsing Hua University, Taiwan
Correspondent: Click to Email
This study investigated the effect of ratio of Zr/(Zr+Ti) on microstructure and corrosion resistance of ZrTiN thin films. ZrTiN thin films were deposited by reactive magnetron sputtering based on our previous optimum coating conditions (substrate temperature, system pressure, nitrogen flow etc.) for TiN and ZrN thin films. The ratios of Zr/( Zr+Ti) were dominating by changing Ti and Zr target power, and found out the optimum composition with desired properties. The ratio of N/Ti/Zr and composition of ZrTiN thin film were analyzed by X-ray Photoelectron Spectroscopy (XPS) and Rutherford Backscattering Spectrometer (RBS). In terms of phase formation, there were two types of coatings were considered, single-phase solid solution of ZrxTiyN and interlacing nucleus of TiN or ZrN in the matrix of ZrxTiyN. The thickness of ZrTiN films measured by scanning electron microscope (SEM) was greater than 900 nm. The composition depth profiles measured by Auger electron spectrometer (AES) indicated that the compositions in the ZrTiN films were uniform from the film surface to the 304 stainless steel substrate. The crystal structure of the ZrTiN films was determined by X-ray diffraction (XRD) using a M18XHF-SRA diffractometer with Cu Kα radiation. Reflection line of ZrTiN (002) peak is observed between those of TiN (002) peak and ZrN (002) peak, similarly, reflection line of ZrTiN (111) peak is observed between those of TiN(111) peak and ZrN(111) peak, respectively. The corrosion resistance of ZrTiN films on commercial AISI 304 stainless steel has been investigated by electrochemical measurement. The electrolyte, 0.5 M H2SO4 containing 0.05 M KSCN, was used for the potentiodynamic polarization. The potentiodynamic scan was conducted from - 800 to 800 mV (SCE) with scan rate ranging from 10 to 600 mV/min. The variation of Zr/(Zr+Ti) ratio on the microstructure and corrosion resistance of ZrTiN film was investigated.