| AVS 56th International Symposium & Exhibition | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE-TuP |
| Session: | Advanced Surface Engineering Poster Session |
| Presenter: | Y.J. Park, Inha University, Republic of Korea |
| Authors: | Y.J. Park, Inha University, Republic of Korea K.M.A. Sobahan, Inha University, Republic of Korea J.J. Kim, Inha University, Republic of Korea C.K. Hwangbo, Inha University, Republic of Korea |
| Correspondent: | Click to Email |
Glancing angle deposition (GLAD) is a sophisticated technique to fabricate engineered nanostructured thin films for next generation nano and micro devices. In this technique, oblique angle deposition and substrate rotation are employed to control the shapes and porosity of the films, caused by a self-shadowing effect and surface diffusion. Recently, the applications of the properties of the GLAD thin films become the basis of a wide array of industrial components including high-speed gas sensors, optical thin films or nanoporous coatings.
In this study, we investigate the optical and structural properties of normal incidence polarizing beam-splitter. It is realized as a combination of quarter-wave plate, Bragg reflector and opposite quarter-wave plate. The zigzag microstructures of the quarter-wave plates as well as the opposite quarter-wave plates and the helical structure of the Bragg reflector are fabricated by electron beam evaporation using GLAD technique and TiO2 material is used in this purpose. The physical thicknesses of the opposite and quarter-wave plates are calculated using their anisotropy. It is found that the normal incidence polarizing beam-splitter reflects the p-polarized light while transmits the s-polarized light with wavelength lying in the Bragg regime. The structural and surface morphology of this device are also investigated using scanning electron microscope.