| AVS 56th International Symposium & Exhibition | |
| Advanced Surface Engineering | Monday Sessions |
| Session SE-MoA |
| Session: | Atmospheric Pressure Plasmas |
| Presenter: | Y. Glukhoy, American Advanced Ion Beam Inc. |
| Correspondent: | Click to Email |
A saddle-like ICP antenna with the several spiral coils distributed with an angular uniformity and enveloping a quartz tube of a plasma reactor was developed. It generates a transversal RF field directed normally to axis of this reactor. Due to such a design property of this antenna can be tuned between an initial capacitively coupled and a following inductively coupled state to facilitate a plasma ignition especialy at atmospheric pressure. Unlike a conventional coil generating a filament-like ICP atmospheric discharge this antenna provides a larger high temperature area for evaporation of precursor as well as for a plasma-chemical reaction. This antenna was successfully tested for nanocoating by silicon dioxide of the different surfaces including the inner walls of the hollow articles.
1. Y.Glukhoy, I. Ivanov RF Atmospheric Plasma Systems for Nanopowder Production and Deposition of Nanocrystallines. AVS 53rd International Symposium, San Francisco, California, November , 2006 CA, USA.