AVS 56th International Symposium & Exhibition
    Nanometer-scale Science and Technology Tuesday Sessions
       Session NS-TuP

Paper NS-TuP26
System Evaluation and Optimization of the Measurement Uncertainty in the Nanoscale Step-height Inspection by Dynamic Mode Atomic Force Microscopy

Tuesday, November 10, 2009, 6:00 pm, Room Hall 3

Session: Nanometer-scale Science and Technology Poster Session
Presenter: C.Y. Su, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
Authors: C.Y. Su, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
Y.H. Lin, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
S.S. Pai, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
P.L. Chen, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
N.N. Chu, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
C.C. Yang, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
M.H. Shiao, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
Correspondent: Click to Email
Atomic Force Microscopy (AFM) has been extensively adopted in a variety of applications in nanotechnology. Due to the high sensitivity in z-axis, the capability of mapping height distribution from sample topography with the resolution in the sub-angstrom is achieved. In this study, a standard operation process (SOP) has been designed and implemented in order to optimize operational parameters such as scan rate, drive frequency, target amplitude, set-point, integral gain, proportional gain, look-ahead gain and so forth for the AFM dynamic mode inspection. The step-height standards are provided by the national metrology institute Physikalisch-Technische Bundesanstalt (PTB). System evaluation of the measurement uncertainty is accorded to ISO, Guide to the Expression of Uncertainty in Measurement and ISO 4287, Geometrical Product Specifications (GPS) - Surface texture: Profile method – Terms, definitions and surface texture parameters. Repeatability, non-linearity, straightness, noise, probe deformation error, numerical error, system long-term stability and sample uniformity have been included in this evaluation.