| AVS 56th International Symposium & Exhibition | |
| MEMS and NEMS | Thursday Sessions |
| Session MN-ThP |
| Session: | MEMS and NEMS Poster Session |
| Presenter: | M. Palacio, The Ohio State University |
| Authors: | B. Bhushan, The Ohio State University M. Palacio, The Ohio State University S. Schricker, The Ohio State University |
| Correspondent: | Click to Email |