| AVS 56th International Symposium & Exhibition | |
| MEMS and NEMS | Thursday Sessions |
| Session MN-ThP |
| Session: | MEMS and NEMS Poster Session |
| Presenter: | A. Kasahara, NIMS, Japan |
| Authors: | A. Kasahara, NIMS, Japan H. Suzuki, NIMS, Japan M. Goto, NIMS, Japan H. Araki, NIMS, Japan P. Yuriy, NIMS, Japan M. Tosa, NIMS, Japan |
| Correspondent: | Click to Email |