| AVS 56th International Symposium & Exhibition | |
| MEMS and NEMS | Friday Sessions |
| Session MN-FrM |
| Session: | Multi-scale Interactions of Materials and Fabrication at the Micro- and Nano-scale |
| Presenter: | K. Turner, University of California, Santa Barbara |
| Correspondent: | Click to Email |
Resonant microelectromechanical systems are key building blocks for many microsensor applications, including mass detection, inertial detection and RF filters and timing oscillators. Especially in high-Quality-factor systems, often amplitudes are such that nonlinearities are present. In many applications, these nonlinearities can be significant, and need to be accounted for. In this talk, I will give an overview of a few applications where understanding and cleverly utilizing nonlinearity actually results in improved sensor performance.
Examples including mass sensors and resonant angular rate sensors (Coriolis force sensors) will be used to explain these concepts.