AVS 56th International Symposium & Exhibition
    MEMS and NEMS Thursday Sessions
       Session MN+GR-ThM

Paper MN+GR-ThM9
Fabrication of a Reusable Template Based on Ultrananocrystalline Diamond for Electrodeposition of Metal and Semiconductor Micro/Nanowires

Thursday, November 12, 2009, 10:40 am, Room A8

Session: Graphene and Carbon Based MEMS/NEMS Devices
Presenter: D.B. Seley, University of Wisconsin - Stevens Point
Authors: D.B. Seley, University of Wisconsin - Stevens Point
D.A. Dissing, University of Wisconsin - Stevens Point
A.V. Sumant, Argonne National Laboratory
R. Divan, Argonne National Laboratory
S. Miller, Argonne National Laboratory
E.A. Terrell, University of Wisconsin - Stevens Point
O.H. Auciello, Argonne National Laboratory
M.P. Zach, University of Wisconsin - Stevens Point
Correspondent: Click to Email

Electrodeposition is a versatile technique that has been used for the synthesis of nanowires. There are several methods available for the synthesis of nanowires, each requiring some form of template, which is not easily reusable. A recent report uses a combination of optical lithography, and the conductive edges of a metal for the deposition of nanowires, but the patterned metal is sacrificial, requiring a multi-step process to regenerate the electrode (1).

We demonstrate a top-down approach involving lithography and reactive ion-etching of ultrathin (150 nm) undoped and N-doped ultrananocrystalline diamond (UNCD) stack defining nanoelectrodes for subsequent electrodeposition of micro/nanowires of desired materials. Once this template consisting of arrays of nanoelectrodes of various shapes has been made, it is a permanent reusable template for synthesis of micro- and nanowires. Subsequent manufacture of nanowires becomes almost as simple as using a rubber stamp and ink. The multilayer diamond electrode provides low adhesion to the deposited materials which allows for easy transfer of the resulting electrodeposited micro- or nanostructures onto an adhesive polymer. Each set of structures is removed, regenerating a pristine electrode surface for multiple depositions without needing to repeat the difficult lithography steps for each batch of wires made. The combination of unique electrical and chemical properties of UNCD is promising to allow mass production of uniform patterned nanostructures. Materials electrodeposited until now include: Pb, Au, Cu, Pd, Pt, Co (non-aqueous), Te, CdTe, and CdS.

Acknowledgments

Use of the Center for Nanoscale Materials was supported by the U. S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357

Additional support was provided by UPDC Fund (UWSP), WiTAG and University of Wisconsin-System.

1. E. J. Menke, M. A. Thompson, C. Xiang, L. C. Yang and R. M. Penner, Nature Materials, 5, 914 (2006).