Paper EW-WeL4
Modern e-Gun Evaporation Simplified for Research and Pilot Production Applications

Wednesday, November 11, 2009, 1:00 pm, Room Exhibit Hall 1

Over the past 50 years electron beam sources have gone through numerous transformations. As the vacuum coating industry has evolved, electron guns have advanced from simple permanent magnet sources to sources with advanced magnetics and electromagnetic sweeping to meet the numerous application needs.

In the late 1980’s, Thermionics’ HM2 sources introduced discrete modular magnet technology which allowed beam shapes to be optimally configured for a process. This also provided a mechanism for advancing co-deposition making possible a source that could evaporate 6 materials simultaneously with complete independent control while maintaining extremely close crucible locations. The introduction of high frequency beam sweep helped to further increase the uniformity of the e-beam temperature making the sources more reliable

Modern sources such as the Thermionics’ RC and HC e-Guns utilize traditional magnets with a series of modified pole extensions to create the effect of a discrete modular magnet source while still providing a “simple to service” source. Other features such as dual filament emitter assemblies and plug in emitter modules allow a high level of performance with minimum maintenance and technical expertise. This new generation of sources blend the past function oriented source with the modern high performance source allowing the average graduate student or research scientist access to the full spectrum of e-gun evaporation.

While sources have evolved, system technology has also been steadily moving forward. New systems incorporate hinged quick access doors and fully automated computer controls. Thermionics latest machine tools go one step further with cartridge loaded sources and sample holders. This new level of flexibility allows a research group to change process recipes in just minutes.