Diluted magnetic semiconductors (DMS) have recently attracted considerable attention due to their potential applications for spintronic devices, such as spin-valve transistors, nonvolatile memory, and magneto-optical switches. ZnMnO is one of the most promising DMS materials due to its predicted above room temperature ferromagnetism. In this study, ZnO layer was conformally deposited on the surface of polystyrene (PS) nanoshpere by atomic layer deposition (ALD). After removal of PS nanosphere by heating, ZnO hollow nanospheres were formed. Then the Zn_1-xMn_xO ( x=0~0.1 ) coatings were grown on ZnO hollow nanospheres by Nd:YAG pulsed laser deposition(PLD). According to the results of high-resolution x-ray diffraction, the Zn_1-xMn_xO / ZnO hollow nanospheres are polycrystalline with a preferential growth direction of (002). Atomic force microscopy (AFM) and magnetic force microscopy (MFM) images show that the magnetic properties of Mn doped ZnO hollow nanospheres strongly depend on the Mn composition fraction and the size of nanospheres. Photoluminescence spectra demonstrate ultraviolet emission peaks which have shift with the increase of Mn ion concentration. The temperature-dependent magnetization (M-T) curves of the Zn_1-xMn_xO hollow nanospheres were measured by a superconducting quantum interference device (SQUID) magnetometer and also depend on the Mn composition fraction and the size of nanospheres.