| AVS 56th International Symposium & Exhibition | |
| Applied Surface Science | Tuesday Sessions |
| Session AS-TuP |
| Session: | Applied Surface Science Poster Session |
| Presenter: | E.G. Keim, University of Twente, The Netherlands |
| Authors: | E.G. Keim, University of Twente, The Netherlands W. Lisowski, Polish Academy of Sciences, Poland |
| Correspondent: | Click to Email |
Using a combination of TEM and XPS, we made an analysis of the complex high-temperature annealing effect on ultra-thin titanium deuteride (TiDy) films evaporated on a Si(100) substrate and covered by an ultra-thin Pd layer. Annealing induced deuterium evolution from such material1 can be applied as a useful source of deuterium used in chemical and energetic reactions. In this report we show to what extent structural changes occur within the ultrathin Si/TiDy/Pd film area as a result of annealing. The TEM/XPS data are compared for two films, one taken before, the second after annealing. 10 - 20 nm thick TiDy films on a Si substrate each covered by 10 - 20 nm thick Pd were prepared in a UHV glass system2. Mass spectrometry was used to monitor in situ deuterium evolution from the film during annealing, all other analyses were performed ex situ. It was found that the Si/TiDy/Pd assembly undergoes a microstructural and chemical conversion as a result of annealing. Energy Filtered TEM (EFTEM) mapping of cross-section images and XPS depth profiling analysis revealed both a broad intermixing between the Ti and Pd layers and an extensive inter-diffusion of Si from the substrate into the film bulk area. Selected Area Diffraction (SAD) reveals very fine crystallites of PdTi2 and the initial stages of TiSi phase formation. Segregation of Ti towards the Pd top layer surface has been evidenced using Angle Resolved XPS (ARXPS) and the EFTEM image analysis.
References
1W. Lisowski, E.G. Keim, A.H.J. van den Berg, M.A. Smithers, Anal. Bioanal. Chem. 385 (2006) 700.
2W. Lisowski, Vacuum, 54, 13 (1999).