| AVS 56th International Symposium & Exhibition | |
| Applied Surface Science | Monday Sessions |
| Session AS+EM+MS+TF-MoA |
| Session: | Spectroscopic Ellipsometry II |
| Presenter: | R.A. May, University of Texas at Austin |
| Authors: | R.A. May, University of Texas at Austin D.W. Flaherty, University of Texas at Austin C.B. Mullins, University of Texas at Austin K.J. Stevenson, University of Texas at Austin |
| Correspondent: | Click to Email |
Ellipsometric porosimetry (EP) relies on monitoring the change in optical properties during vapor adsorption/desorption and has been successfully applied to an array of materials using a variety of adsorbates both in vacuum and at ambient pressures. However, these studies typically avoid the analysis of optically complex systems with strong absorbance or optical anisotropy. Towards this end, a hybrid quartz crystal microbalance/ ellipsometric porosimetry (QCM/EP) technique is being developed to facilitate the study of more complex optical materials and to quantitatively estimate parameters such as porosity, pore size distribution, and surface area. To highlight the power of this hybrid approach thin films of TiO2 and TiC, have been deposited using reactive ballistic deposition (RBD). RBD provides control over film parameters such as surface area, porosity, pore size, and birefringence through variation of the deposition angle. Combined with the QCM/EP technique these films provide a platform for understanding both novel material properties and the requirements for extracting valid optical constants from anisotropic optical materials.