AVS 53rd International Symposium
    Vacuum Technology Wednesday Sessions
       Session VT+AS-WeM

Paper VT+AS-WeM11
Reducing SS 304/316 Hydrogen Outgas to 2E-15 torr liter/cm@super 2@ s

Wednesday, November 15, 2006, 11:20 am, Room 2000a

Session: Outgassing, Materials Coatings for Reduction of Outgassing
Presenter: Y.T. Sasaki, Quantum Mechanics Corp.
Correspondent: Click to Email

Significant reduction in the outgassing rate of 300-series stainless steel is routinely attained through combination of electropolishing and vacuum baking. Preferential removal of Ni, Fe, and Mn from the surface of stainless steel by electropolishing creates virtual chromium coating without trapping impurities under the surface. It also reduces the atomic surface area by more than an order of magnitude. When the material is vacuum-fired to remove interstitial hydrogen, the resultant stainless steel exhibits an outgas rate of ca. 2E-15 torr liter/cm@super 2@ s, as well as drastically reduced adsorption, absorption and catalytic behaviors.