AVS 53rd International Symposium
    Thin Film Thursday Sessions
       Session TF1-ThA

Paper TF1-ThA5
Digital Electrostatic Electron-Beam Array Lithography (DEAL) Prototype Improvements

Thursday, November 16, 2006, 3:20 pm, Room 2020

Session: Field Emission
Presenter: R.B. Rucker, University of Tennessee
Authors: R.B. Rucker, University of Tennessee
S.J. Randolph, Oak Ridge National Laboratory and University of Tennessee
L.R. Baylor, Oak Ridge National Laboratory
W.L. Gardner, Oak Ridge National Laboratory
K.L. Klein, Oak Ridge National Laboratory and University of Tennessee
M.A. Guillorn, IBM
S. Islam, University of Tennessee
Y. Guan, University of Tennessee
T. Rahman, University of Tennessee
S.A. Eliza, University of Tennessee
T. Grundman, University of Tennessee
R. Vijayaraghavan, University of Tennessee
D.C. Joy, Oak Ridge National Laboratory and University of Tennessee
P.D. Rack, Oak Ridge National Laboratory and University of Tennessee
D.K. Hensley, Oak Ridge National Laboratory
R.J. Kasica, Oak Ridge National Laboratory
D.K. Thomas, Oak Ridge National Laboratory
T. Bigelow, Oak Ridge National Laboratory
Correspondent: Click to Email
The Digital Electrostatic electron beam Array Lithography (DEAL) design is presently under development at Oak Ridge National Laboratory.@footnote 1@ The device is designed for massively parallel electron beam lithography that encompasses an array of individually addressable field emitters (FE) and an electrostatic focusing grid. The device design has shifted from utilizing carbon nanofiber (CNF)-based cathodes to tungsten (W) nanofibers deposited by electron-beam-induced deposition (EBID), which has considerably improved the quality and placement of the emitter. The tungsten nanofibers provide performance improvements from the localization of emission sites and a reduction of chromatic aberration. In an effort to increase the depth of focus and lower beam divergence, as well as to function as a focusing electrode, a 500-nm diameter beam- forming aperture has been developed. Fabrication and operation details will be covered, which demonstrates further improved performance of the device design. @FootnoteText@ @footnote 1@This research was sponsored by the Defense Advanced Research Projects Agency (DARPA) under contract No. DARPA-MIPR-97-1357 with ORNL. The research was carried out at ORNL and the University of Tennessee, managed by UT-Battelle, LLC, for the U.S. Department of Energy under contract No. DE-AC05-00OR22725. 2 L. R. Baylor, D. H. Lowndes, M. L. Simpson, C. E. Thomas, M. A. Guillorn, V. I. Merkulov, J. H. Whealton, E. D. Ellis, D. K. Hensley, and A. V. Melechko, J. Vac. Sci. Technol. B 20, 2646 (2002).