AVS 53rd International Symposium
    Thin Film Wednesday Sessions
       Session TF-WeA

Invited Paper TF-WeA5
Thin Film Deposition Technologies Enabling a New Generation of 3-D Integrated All-Solid-State Batteries

Wednesday, November 15, 2006, 3:20 pm, Room 2022

Session: Thin Films for Energy Applications in Photovoltaics, Fuel Cells, Hydrogen Storage & Batteries
Presenter: P. Notten, Philips Research and Eindhoven University of Technology, The Netherlands
Authors: P. Notten, Philips Research and Eindhoven University of Technology, The Netherlands
R.A.H. Niessen, Philips Research Laboratories, The Netherlands
J.H.G. Op het Veld, Philips Research Laboratories, The Netherlands
Correspondent: Click to Email
It is anticipated by the electronic industry that smart Autonomous Devices, enabling future Ambient Intelligence inside offices and houses, will play a dominant role in our future life. Characteristic of these Autonomous Devices is that these should operate independently, meaning that the energy supply must be guaranteed wirelessly. This implies that both energy scavenging and electrochemical energy storage are of crucial importance for these devices. It has been reported that all-solid-state Li-based rechargeable batteries can be frequently charged and discharged. These thin-film batteries were, however, planar structured and include a dynamic metallic lithium anode. The thin film geometries were grown, by making use of physical deposition techniques. However, the geometric energy density of these devices is unfortunately relatively low due to its planar structure. Interestingly, it has recently been discovered that the amount of Li which could be reversibly intercalated and de-intercalated in thin film Silicon electrodes is about 10 times higher than in conventional graphite electrodes, making these anodes much more energy dense and, compared to metallic Li, mechanically more robust. Silicon is a well-known substrate material nowadays widely applied in the electronic IC-industry, allowing a high degree of component integration. One of the latest developments is the integration of capacitors into Si wafers; 3-D structured high surface area substrates are obtained by either physical or wet-chemical etching, enabling the beneficial deposition of high surface area electrode structures. Based on the various above-mentioned developments a new battery concept is proposed to come to fully 3-D integrated, all-solid-state, rechargeable batteries, revealing a high energy density. This concept will be based on the Li-intercalation chemistry of Silicon and LiMeOx. In the present presentation the details of this challenging 3-D integrated battery concept will be disclosed and the electrochemistry of Li-intercalation in Silicon will be reported