AVS 53rd International Symposium
    Thin Film Tuesday Sessions
       Session TF-TuM

Paper TF-TuM5
DC Magnetron Sputtered ITO Thin Film on Plastic Substrate with Hard Coating

Tuesday, November 14, 2006, 9:20 am, Room 2022

Session: Materials for Flexible Substrates, Displays, and Optoelectronics
Presenter: H.-P. Cheng, National Taipei University of Technology, Taiwan, R.O.C.
Authors: H.-P. Cheng, National Taipei University of Technology, Taiwan, R.O.C.
C.-W. Sun, National Taipei University of Technology, Taiwan, R.O.C.
T.-H. Chen, National Chiao Tung University, Taiwan, R.O.C.
Correspondent: Click to Email
The conventional substrates used on monitor are mostly made of glass. Glass has disadvantages of inconvenience in transporting, heavy, fragile, low impact tolerance. The thickness of the glass substrate is facing bottleneck in technical development. Thus, the development of plastic substrate is the growing application. This study focused on the application of DC magnetic sputtering on plastic substrate for sputtering ITO transparent conducting films, and discussed the relationship between the structure and photoelectric properties. The results showed that due to the heat-resistance problem of the plastic substrate, when the substrate temperature is over 60 degree C, ITO film would fracture due to heat stress. Thus, using sputtering under room temperature and lower power could prevent the fracture. Also, the thin film has low adhesiveness due to the characteristics of the plastic substrate, thus, the plastic substrate treated with hard coat could improve the adhesiveness. In terms of the electric properties, the conductivity of ITO film improves as the sputtering time increases, the oxygen pressure decreases, and the proper working pressure is selected. In terms of photoelectric properties, the transmission of light for the ITO film increases as the sputtering time increases, the oxygen pressure increases, and the proper working pressure is selected. After four-point probe test on the electric properties and spectrometer used to measure the transmission of light, the results showed the best resistivity to be 6.96E-4 Ohm.cm, whereas the transmission of light on the test sample is as high as 80%.