AVS 53rd International Symposium
    Thin Film Tuesday Sessions
       Session TF-TuM

Invited Paper TF-TuM3
Thin-Film Amorphous Silicon Transistors on Flexible Substrates

Tuesday, November 14, 2006, 8:40 am, Room 2022

Session: Materials for Flexible Substrates, Displays, and Optoelectronics
Presenter: D. Loy, U.S. Army Flexible Display Center
Correspondent: Click to Email

The Flexible Display Center (FDC) at Arizona State University is focused on developing thin film transistor (TFT) devices on flexible substrates, for use in a variety of reflective and emissive display technologies. We are currently fabricating amorphous silicon TFT backplanes on a 6” Wafer-Scale Pilot Line linked to a Manufacturing Execution System and supported by a comprehensive suite of in-Fab metrology tools. We are simultaneously installing a GEN II (370 x 470 mm) Display-Scale Pilot Line, with qualified operation slated for late 2006. This talk overviews the critical steps in our backplane technology evolution, from qualification of our baseline low temperature a-Si process on the 6” line with rigid substrates, to transferring the process to flexible plastic and metal foil substrates, to form factor scale-up of the TFT arrays, and finally Pilot Line scale-up to GEN II. Keywords: Flexible displays, backplane electronics, Thin Film Transistors (TFTs), electrophoretic ink, OLEDs