AVS 53rd International Symposium
    Thin Film Thursday Sessions
       Session TF-ThP

Paper TF-ThP16
Characterization of TFT-LCD and OLEDs Devices by Phase Modulated Spectroscopic Ellipsometry for Display Applications

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: Thin Film Poster Session
Presenter: Y. Ji, HORIBA Jobin Yvon Inc
Authors: E. Teboul, HORIBA Jobin Yvon Inc
Y. Ji, HORIBA Jobin Yvon Inc
N. Nabatova-Gabain, HORIBA Ltd.
Correspondent: Click to Email
Accurate and reliable optical characterization of polymers, liquid crystals (LCs) and organic light emitting diodes (OLEDs) is a crucial step in the manufacturing process of flat panel display. Different methods for measuring the optical constants and multiple film thickness of solid materials are available. One of the most sensitive and accurate method that measure simultaneously optical constants and film thickness is the well established technique called Spectroscopic Ellipsometry. Beside the fact that only few optical data are available for LCs and OLEDs, these devices are formed by complex structure such as multi-layer stacks including anisotropy, absorbing and graded materials. Therefore, the correct use of spectroscopic ellipsometry to characterize complex materials such as the ones found in LCs and OLEDs, require a combination of the proper choice of hardware and the appropriate ellipsometric model to analyze the data. Compare to conventional ellipsometers technique, Phase Modulated Spectroscopic Ellipsometry (PMSE) provide significant advantages for display applications. Its technology is most suitable for accurate thin film measurements on transparent substrate. In this work, we presents ellipsometric results obtained by a commercially available phase modulated spectroscopic ellipsometer on full TFT-LCD structure characterized from UV to NIR. As expected, strong anisotropy and inhomogeneous optical properties were found respectively on LCs and ITO materials. We also introduce the results on OLEDs devices previously published by Tsuboi et al (IEICE Transact. Electronics, E87-C, No.12 (2004) 2039-2044). In this case, it was found that film thickness and optical constants of a single layer differs significantly from the measurements of the same materials in a multiple layer configuration.