Growth of metallic nano-clusters and control over their size are critically important for catalysis. Development of film patterning at the nanometer scale has significant impact on future lithography. In this work we combine a method to deposit metallic nano-clusters using weakly bound buffer layer as an intermediate substance to control the clusters size with laser patterning that modulates their surface density. Using optical probes, the size selected diffusion of gold nano-clusters on metallic and oxygen modified surfaces has been studied. Information on clusters mobility is critical for understanding and control the thermal stability of clusters toward the development of sintering resistant catalysts. The same technique was further developed at thicker film thickness to pattern the layer at the sub-micron to nanometer scale employing a single laser pulse. This technique is discussed as a novel approach for lithography.