AVS 53rd International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP38
Measurement of Residual Water on Aluminum Surface by PMIRRAS

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Surface Science Poster Session
Presenter: H.P. Hsueh, NSRRC, Taiwan
Authors: H.P. Hsueh, NSRRC, Taiwan
C.W. Yeh, NTHU, Taiwan
G.Y. Hsiung, NSRRC, Taiwan
J.R. Chen, NSRRC and NTHU, Taiwan
Correspondent: Click to Email
Water always plays a vital role in the cleaning process of aluminum material used in UHV or XHV devices like the vacuum chambers used in large accelerators. Yet it is the residual water inside or on the thin alumina layer on top of the bulk aluminum material that was hated most in UHV or XHV regime since it is one of the major obstacles to achieve XHV. Phase modulated infrared reflection absorption spectroscopy (PMIRRAS) system has been setup and used in this study to explore how the residual water interacts with alumina surface layer of bulk aluminum as different cleaning method is applied. Both residual water quantity and their binding mechanism will be measured and analyzed. Cleaning methods include ozone water cleaning and traditional acid (HNO3+HF) and alkali (NaOH) cleaning etc. With this study, it will be determined which cleaning method has the most effective way to clean aluminum surface (contaminations less than a certain level) and yet generate either less residual water or easier repelled residual water by baking at lower temperature or shorter period. Some spectra have been measured and water spectrum at 3450 1/cm has been identified. Further analysis of obtained data will be carried out. More samples will be measured and the results will be discussed.