AVS 53rd International Symposium
    Surface Science Thursday Sessions
       Session SS-ThP

Paper SS-ThP16
Tribological Properties of Micro Patterned Surface

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: Surface Science Poster Session
Presenter: M. Nakano, AIST, Japan
Authors: M. Nakano, AIST, Japan
K. Miyake, AIST, Japan
T. Murakami, AIST, Japan
Y. Ando, AIST, Japan
S. Sasaki, AIST, Japan
Correspondent: Click to Email
Recently, the tribological properties of micro-patterned surfaces have been investigated and it has been shown that the feature of surface can affect the friction behavior of lubricated surface. In this study, the micro-patterned surface was prepared by photorisography, plasma ethcing and evaporation of NiFe alloy on Si surface in order to investigate the effect of the surface texture on the tribological properties under lubrication condition. The size of pattern was from 10 µm to 100 µm and the depth was about 10 µm. The friction test was carried out using pin-on-plate tribometer. The normal load was varied from 10 mN to 100 mN and the sliding speed was from 1mm/sec to 10 mm/sec. The commercial lubricants and the pins made of cast iron were used. The patterned surface showed less variation of friction force with the variation of the normal load than the flat surface. Moreover, the friction force of the patterned surface became lower. On the other hand, in the case of dry condition, the friction coefficient was high and the friction behavior was independent of surface feature. Therefore, it was considered that the surface texturing affect the lubricant film thickness and the frictional behavior.