AVS 53rd International Symposium
    Advanced Surface Engineering Friday Sessions
       Session SE2-FrM

Paper SE2-FrM12
Tribochemical Studies on Single Crystal Surfaces using Atomic Force Microscopy

Friday, November 17, 2006, 11:40 am, Room 2007a

Session: Wear Mechanisms, Tribochemistry and Nanotribology
Presenter: J.T. Dickinson, Washington State University
Authors: J.T. Dickinson, Washington State University
A. McEvoy, Washington State University
S.C. Langford, Washington State University
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We have examined two tribochemical processes on single crystal surfaces using the atomic force microscope that result in nanometer scale modification. Using solutions appropriate for crystal growth or crystal dissolution we show that application of tribological stimulation can lead to highly localized, in some cases atomic, deposition or material removal. The samples of current study include cleavage surfaces of calcite and gypsum (for growth) and Si(100) for tip-induced dissolution. The latter study relates directly to understanding the mechanisms of chemical mechanical planarization of silicon wafers where today's requirements for topography have reached the sub-nanometer scale.