AVS 53rd International Symposium
    Advanced Surface Engineering Wednesday Sessions
       Session SE1-WeA

Paper SE1-WeA4
Structurally-chiral Films Fabricated for DUV Wavelengths by Serial Bi-Deposition

Wednesday, November 15, 2006, 3:00 pm, Room 2007

Session: Glancing Angle Deposition
Presenter: L. De Silva, University of Otago, New Zealand
Authors: L. De Silva, University of Otago, New Zealand
I. Hodgkinson, University of Otago, New Zealand
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We report serial bi-deposition (SBD) of structurally-chiral films for deep ultraviolet (DUV) wavelengths. Scanning electron micrographs confirm that the films have a twisted-columnar nanostructure similar to a double-start screw. Observation of circular Bragg resonances in reflection and transmission at around 230 nm indicates a dielectric pitch of 65 nm, an average refractive index of 1.75 and local in-plane linear birefringence of 0.05. Possible applications of DUV chiral media include novel thin film polarizing devices for use in the DUV spectral region where the range of available devices is severely constrained by material properties.