AVS 53rd International Symposium
    Advanced Surface Engineering Friday Sessions
       Session SE1-FrM

Paper SE1-FrM7
Growth and Characterization of Ti-Al-C Thin Films Deposited by dc Magnetron Sputtering from a Ti@sub 2@AlC Compound Target

Friday, November 17, 2006, 10:00 am, Room 2007

Session: Coatings with Enhanced Thermal Stability & MAX Phases
Presenter: J. Frodelius, Linköping University, Sweden
Authors: J. Frodelius, Linköping University, Sweden
P. Eklund, Linköping University, Sweden
H. Högberg, Linköping University, Sweden
L. Hultman, Linköping University, Sweden
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The ternary carbides and nitrides referred to as the MAX phases exhibit properties combining typical ceramic characteristics such as resistance to oxidation and thermal shock with electrical resistivity values comparable to those typically found in metals. These merits suggest many application areas for MAX phases both in the form of bulk material, such as heating elements and gas nozzles, as well as functional thin films in sensors and microelectronics. The synthesis of well-defined epitaxial thin films has progressed lately by the development of a magnetron sputtering process from elemental sources. This method is, however, less suited for growth under industrial conditions. In this study we present the synthesis of Ti-Al-C films on Al@sub 2@O@sub 3@ (0001) as well as Mo substrates, using dc magnetron sputtering from a Ti@sub 2@AlC target.@footnote 1@ The growth, structure and properties of Ti-Al-C films were investigated by XRD, SEM, TEM, EDS, nanoindentation and four-point-probe measurements. The films were synthesized for a wide range of substrate temperatures from ambient to 1000 °C as well as different substrate bias and target-to-substrate distances. The growth of Ti@sub 2@AlC films on Al@sub 2@O@sub 3@ (0001) substrates appear to be restricted to a narrow temperature regime around 700 °C. Below that, films consist of TiC:Al and for higher substrate temperatures, there is preferred growth of epitaxial TiC cubic phase. These films are depleted in Al, as revealed by EDS measurements. @FootnoteText@ @footnote 1@ MAXTHAL 211, courtesy of Kanthal AB.